I'm sure you let your filter oil dry before putting it back on, right?
Did you reset the ECU after cleaning the MAFS? Might be something to try again, regardless.
Have you removed the butterfly? There's an issue with it being off, causing a low idle in neutral. In a manual transmission, some people have even had their car shut off in a panic brake.
When was the last time the throttle body was cleaned? When was the last time you ran fuel injector cleaner?